Selected Publications
The application of nuclear reaction techniques to hydrogen analysis problems in metallurgical, mineralogical and semiconductor areas is described. Hydrogen analyses and profiles obtained with both the 1H(19F, αγ)16O and 1H(15N, αγ)12C reactions are presented. The advantages and disadvantages of the two techniques are discussed. Particular emphasis will be given to interpretive problems associated with analyzing the data. Various corrections to the data will be discussed, including off-resonance cross-section corrections and lower energy resonance corrections. Both crystalline and amorphous materials are examined. The hydrogen content of electrodeposited hard gold films has been determined as a function of plating conditions. Hydrogen contents as high as 9 atom % have been measured. The hydrogen profile of natural and synthetic SiO2 samples was determined. Hydrogen was found to be quite stable in amorphous silica samples but highly mobile in crystalline quartz samples under the analysis conditions. A hydrogen depth profile for a film of glow discharge deposited amorphous silicon (∼4500 Å thick) has been obtained and will be compared with a profile measured by secondary ion mass spectrometry (SIMS) on the same sample.
Over the last few years many ion beam techniques have been reported for the profiling of hydrogen in materials. We have evaluated nine of these using similar samples of hydrogen ion-implanted into silicon. When possible the samples were analysed using two or more techniques to confirm the ion-implanted accuracy. We report the results of this work which has produced a consensus profile of H in silicon which is useful as a calibration standard. The analytical techniques used have capabilities ranging from very high depth resolution (≈50Å) and high sensitivity (< 1 ppm) to deep probes for hydrogen which can sample throughout thin sheets (up to 0.2 mm thick).