Selected Publications

Kyle Larsen, Stefan Lehnardt, Bryce Anderson, Joseph Rowley, Richard Vanfleet, and Robert Davis

Estimating the elastic modulus and strength of heterogeneous films requires local measurement techniques. For local mechanical film testing, microcantilevers were cut into suspended many-layer graphene using a focused ion beam. An optical transmittance technique was used to map thickness near the cantilevers, and multipoint force–deflection mapping with an atomic force microscope was used to record the compliance of the cantilevers. These data were used to estimate the elastic modulus of the film by fitting the compliance at multiple locations along the cantilever to a fixed-free Euler–Bernoulli beam model. This method resulted in a lower uncertainty than is possible from analyzing only a single force–deflection. The breaking strength of the film was also found by deflecting cantilevers until fracture. The average modulus and strength of the many-layer graphene films are 300 and 12 GPa, respectively. The multipoint force–deflection method is well suited to analyze films that are heterogeneous in thickness or wrinkled.

In the last two decades, advances in the dark field detectors and microscopes of scanning transmission electron microscopy (STEM) have inspired a resurgence of interest in quantitative STEM analysis. One promising avenue is the use of STEM as a nanothermometric probe. In this application, thermal diffuse scattering, captured by a CCD camera or an annular dark field detector, acts as an indirect measurement of the specimen temperature. One challenge with taking such a measurement is achieving adequate sensitivity to quantify a change in scattered electron signal on the order of 1% or less of the full electron beam. Another difficulty is decoupling the thermal effect on electron scattering from scattering changes due to differing specimen thicknesses and materials. To address these issues, we have developed a method using STEM, combined with electron energy loss spectroscopy (EELS), to produce a material-specific calibration curve. On silicon, across the range 89 K to 294 K, we measured a monotonically increasing HAADF signal ranging from 4.0% to 4.4% of the direct beam intensity at a thickness-to-mean-free-path ratio of 0.5. This yielded a calibration curve of temperature versus full-beam-normalized, thickness-normalized HAADF signal. The method enables thermal measurements on a specimen of varying local thickness at a spatial resolution of a few nanometers. We demonstrated the potential of the technique for testing electron scattering models by applying single-electron scattering theory to the data collected to extract a measurement of the mean atomic vibration amplitude in silicon at 294 K. The measured value, 0.00738 +/- 0.00002 nm, agrees well with reported measurement using X-rays.

Hollow cathode plasmas are common extreme ultraviolet (EUV) lamps used for material characterization. However, the relatively high pressure of the plasma can affect downstream instruments, as well as absorb the EUV. EUV windows are difficult to fabricate due to EUV’s strong interaction with all materials. We present a carbon nanotube (CNT) microfabricated window composed of multiple high aspect-ratio columns in parallel. The open areas allow wide bandpass transmission, while the walls restrict gas flow. We model the CNT window transmission as a weight function on the light from of a Mcpherson 629-like hollow cathode helium plasma in visible wavelengths. We model the CNT window differential pumping as a series of columns between two chambers of different pressures.

Tyler Westover, Scott Olsen, Zach Westhoff, Nick Morrill, Robert Davis, and Richard Vanfleet

Traditional collimators typically require large optics and/or long pathlengths which makes miniaturization difficult. Carbon nanotube templated microfabrication offers a solution to pattern small 3D structures, such as parallel hole collimators. Here we present the characterization of a carbon nanotube parallel hole collimator design and its efficacy in visible and short wavelength infrared light. Comparison to geometric and far field diffraction models are shown to give a close fit, making this a promising technology for miniaturized diffuse light collimation.

Some of the least reflective materials are vertically aligned carbon nanotubes (VACNTs). However, VACNT films are extremely fragile, restricting the range of applications where they can be used. Here, we have formed VACNT/carbon composite films with greater than 500× stiffness and 50× strength compared to as-grown VACNTs while maintaining ultralow reflectance. This is achieved using an infiltration process that coats the individual nanotubes with a thin layer of nanocrystalline carbon, locking the nanotubes together, and then adding lateral subwavelength surface topography to the tops of the VACNTs with an oxygen plasma etch to reduce the reflectance. While still a delicate material, these composites are robust enough to be exposed to water and handled. We demonstrated that these composites can be transferred from the growth substrate to other surfaces resulting in a reflectance of less than 0.1%.acs

Berg Dodson, Guohai Chen, Robert Davis, and Richard Vanfleet

Several electrical devices are formed by growing vertically aligned carbon nanotube (CNT) structures directly on a substrate. In order to attain high aspect ratio CNT forest growths, a support layer for the CNT catalyst, usually alumina, is generally required. In many cases, it has been found that current can pass from a conductive substrate, across the alumina support layer, and through the CNTs with minimal resistance. This is surprising in the cases where alumina is used because alumina has a resistivity of 𝜌>1014ρ>1014 Ω cm. This paper explores the mechanism responsible for current being able to cross the alumina support layer with minimal resistance following CNT growth by using scanning transmission electron microscopy imaging, energy dispersive x-ray spectroscopy, secondary ion mass spectroscopy, and two-point current-voltage (I-V) measurements. Through these methods, it is determined that exposure to the carbonaceous gas used during the CNT growth process is primarily responsible for this phenomenon.