Image from Metrology of ultrathin iron catalyst films by spectroscopic ellipsometry, J. Vac. Sci. Technol. A 44, 043406 (2026).
Faculty: David Allred, Robert Davis, Richard Vanfleet
Every project here depends on knowing exactly what we have made. We use spectroscopic ellipsometry to measure film thickness and optical constants, from nanometer-thin iron catalyst layers for nanotube growth to far-ultraviolet mirror coatings. We also use quantitative scanning transmission electron microscopy and mechanical mapping of thin films.
Selected Publications
- Metrology of ultrathin iron catalyst films by spectroscopic ellipsometry, J. Vac. Sci. Technol. A 44, 043406 (2026)
- Variable-angle, spectroscopic ellipsometry study based on determining the effect of first contact polymer on XeF2-passivated MgF2 on Al, Proc. SPIE 13623, 1362308 (2025)
- Variable-angle, spectroscopic ellipsometry study on the repeated application of first contact polymer on silicon-based surfaces, Proc. SPIE 12666, 1266609 (2023)
- Y2O3 optical constants between 5 nm and 50 nm, Opt. Express 27, 3324 (2019)
- Optical constants of evaporated amorphous zinc arsenide (Zn3As2) via spectroscopic ellipsometry, Opt. Mater. Express 9, 4677 (2019)
- Quantitative STEM: A method for measuring temperature and thickness effects on thermal diffuse scattering using STEM/EELS, and for testing electron scattering models, Ultramicroscopy 246, 113684 (2023)
- Determining local modulus and strength of heterogeneous films by force–deflection mapping of microcantilevers, Rev. Sci. Instrum. 94, 033904 (2023)
Complete publication and student thesis lists for each professor are on the People and Publications page.