Nanoscale Structures

Nanoscale high aspect ratio structures have possible applications in microfluidic channels, batteries, and fuel cells, among others. We present methods to create 3:1 aspect ratio structures in transparent materials that will withstand temperatures needed for CVD or ALD processes; including contact molding, spin and etch back, and replica molding.

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# Nanoscale Structures

Nanoscale high aspect ratio structures have possible applications in microfluidic channels,  batteries, and fuel cells, among others. We present methods to create 3:1 aspect ratio  structures in transparent materials that will withstand temperatures needed for CVD or ALD  processes; including contact molding, spin and etch back, and replica molding.
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